Q150 GB Turbo-Pumped Sputter Coater / Carbon Coater for Glove Box

Vacuum module – including “vacuum shutdown” and glove box pressure interlock

The vacuum module houses all the working components, including the 70 L/s air-cooled turbomolecular pump. An automatic bleed control ensures optimum vacuum conditions during sputtering and a full-range active gauge is fitted as standard to monitor the vacuum.

The Q150 GB includes “vacuum shutdown”, a convenient feature which enhances vacuum performance by allowing the chamber vacuum to be maintained when the coater is not in use.

A unique feature of the Q150 GB is the integral pressure interlock switch. This independently monitors the pressure inside the glove box and turns off the vacuum pump if the glove box atmosphere is unacceptably reduced due to a vacuum leak.

The vacuum chamber is 214 mm high to allow for increased source-to-substrate distances required for coating large specimens. It has an external diameter of 165 mm and comes with an integral implosion guard. The chamber assembly is easy to remove to allow specimen exchange and chamber cleaning.

A variable speed rotary specimen stage is fitted as standard, with full height adjustment from 0 to 190 mm above the base plate. Other stages are available as options.

Sputter coating and carbon coating as standard, plus an option for metal evaporation

Quick-change deposition inserts can be swapped in seconds and the intelligent system logic automatically recognises which insert is in place and displays the appropriate operating settings.

High resolution sputter coating

The Q150 GB features a high-resolution sputter coater insert (10034) for oxidising and non-oxidising (noble) metals. A wide selection of sputtering targets is available, including iridium and chromium, which are highly recommended for FE-SEM applications. Please see: Ordering Information for details of available metal targets.

Carbon rod evaporation

The high vacuum carbon rod coating insert (10033) is ideal for the production of highly stable carbon films and surface replicas for transmission electron microscopy (TEM). The Q150 GB uses economical 3.05 mm diameter carbon rods and the advanced “anti-stick” carbon rod evaporation gun offers simple operation and reproducible results.

A carbon fibre evaporation insert (10455) is available as an option (see: Ordering Information).

Controlled ramped carbon rod evaporation

This comes as standard with E and ES models and has two important benefits. Careful control of evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). In addition the quality of the resulting carbon films is enhanced by the eradication of  “sparking” –  a common and unwanted feature of less advanced coating systems.

Controlled pulse carbon cord evaporation

If the optional carbon fibre insert (for E and ES models) is fitted, then controlled profiles ensure carbon is evaporated in short pulses. This significantly reduces the amount debris (including large carbon fragments) associated with traditional carbon “flash” evaporation. Also it allows the carbon cord evaporation process to be accurately controlled using the optional film thickness monitor (FTM) accessory.

Metal evaporation/aperture cleaning option

A quick-change insert (10457) allows metal evaporation from tungsten baskets or molybedenum boats – ideal for thin film applications. For ease of set up in a glove box the metal charge can be loaded into the evaporation source away from the vacuum chamber.

Each of the above configurations can be used with a range of optional accessories. For further details see: Additional Information.